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Scanning capacitance microscopy (SCM) is known to be a valuable tool for carrier mapping and profiling on nanoscale semiconductor samples Certain applications, however, such as quantitative capacitance microscopy on InAs quantum dots, e g require low modulation frequencies and complete darkness, which are requirements completely incompatible with the current commercial SCM systems relying on a laser feedback system For this reason, an intercepted feedback method was developed, which allo
In this work, the influence of the tip geometry in scanning capacitance microscopy is investigated experimentally and theoretically on metal-oxide-semiconductor- !MOS " and Schottky-type junctions on gallium-arsenide !GaAs " Using a two-dimensional model we find that on Schottky-type junctions theelectric field around the tip is screened by the surface states and that the essential parameters entering the capacitance versus voltage C!V " characteristics are the doping level and the contact
The relative electric permittivity of liquid methylbenzene has been determined with an uncertainty of 0 01% from measurements of the resonance frequency of the lowest order inductive-capacitance mode of a re-entrant cavity (J Chem Thermodyn 2005, 37, 684–691) at temperatures between (290 and 406) K and pressures below 20 MPa and at T ) 297 K with a MicroElectricalMechanical System (MEMS) interdigitated comb capacitor For the re-entrant cavity, the working equations were a combination of the